{"id":1855,"date":"2025-08-14T10:34:50","date_gmt":"2025-08-14T02:34:50","guid":{"rendered":"https:\/\/yexintech.com\/?p=1855"},"modified":"2025-10-21T20:04:51","modified_gmt":"2025-10-21T12:04:51","slug":"high-temperature-cvd-tube-furnace","status":"publish","type":"post","link":"https:\/\/yexintech.com\/ja\/high-temperature-cvd-tube-furnace.html","title":{"rendered":"high temperature cvd tube furnace"},"content":{"rendered":"<section class=\"wp-block-themepark-block-themepark-area block_layout thempark-block undefined bom50 top50\" id=\"\" style=\"background-color:#ffffff;padding-top:104px;\" data-swiper-parallax=\"-700\"><div class=\"block_layout_in\" style=\"\">\n<div class=\"wp-block-column block_layout_in\">\n<section class=\"wp-block-themepark-block-themepark-imgtext thempark-block themepark_imgtext moveupd  undefined\" style=\"\"><div class=\"themepark_imgtext_img\" style=\"width:39%;border-radius:18px;\" data-swiper-parallax=\"-1800\"><img class=\"lazyload  swiper-lazy swiper-move-lazy\" style=\"\" data-src=\"https:\/\/yexintech.com\/wp-content\/uploads\/2025\/10\/cvd-furnace-2.webp\" alt=\"cvd furnace\"\/><\/div><div class=\"themepark_imgtext_text\" style=\"width:58%;padding-left:89px;\" data-swiper-parallax=\"-1600\">\n<div class=\"wp-block-column\">\n<div class=\"wp-block-themepark-block-themepark-xian theme_fang_out  top15\" style=\"text-align:left;padding-top:64px;\"><div class=\"fangbox\" style=\"width:undefinedpx;\"><\/div><\/div>\n\n\n\n<div class=\"wp-block-themepark-block-themepark-wright content-super-p\" style=\"font-size:16px;line-height:33px;color:#ffffff;padding:10px 10px;\">\n<div class=\"wp-block-column\">\n<h1 class=\"wp-block-heading has-large-font-size\">High Temperature Cvd Tube Furnace<\/h1>\n\n\n\n<p><\/p>\n\n\n\n<p><\/p>\n\n\n\n<p class=\"has-medium-font-size\"><strong>Scope of application<\/strong><\/p>\n\n\n\n<p><\/p>\n\n\n\n<p>High-temperature CVD (chemical vapor deposition) tube furnace is a special equipment used for material growth, thin film deposition and high-temperature processing. It is widely used in semiconductors, nanomaterials, ceramics, metal coatings and other fields.<\/p>\n\n\n\n<p><\/p>\n\n\n\n<p><\/p>\n\n\n\n<div class=\"wp-block-themepark-block-btn themepark-i-btn-out\" style=\"text-align:undefined;\"><div class=\"themepark-i-btn-out_ins\" style=\"\"><div class=\"themepark-i-btn-out_in\"><div class=\"themepark-i-btn\" style=\"background-color:#2ba8db;color:#000;font-size:16px;border-radius:20px;padding:14px 43px;\"><i class=\"fas fa-phone\"><\/i><span>TEL+8618836556085<\/span><a class=\"hovers  fas fa-phone\" data-title=\"TEL+8618836556085\" style=\"color:#ffffff;background-color:#2ba8db;padding:14px 43px;border-radius:20px;\" rel=\"noopener noreferrer\" target=\"_self\"><\/a><\/div><\/div><\/div><\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div><div class=\"themepark_imgtext_ba\" style=\"opacity:0.95;\"><\/div><\/section>\n\n\n\n<div class=\"wp-block-themepark-block-themepark-xian theme_fang_out  top15\" style=\"text-align:left;padding-top:75px;\"><div class=\"fangbox\" style=\"width:undefinedpx;\"><\/div><\/div>\n\n\n\n<div class=\"wp-block-themepark-block-themepark-wright content-super-p\" style=\"font-size:16px;line-height:20px;color:#ffffff;padding:10px 1px;\">\n<div class=\"wp-block-column\">\n <div class=\"block_breadcrumbs\"><div class=\"breadcrumbs\"><nav> <a itemprop=\"breadcrumb\" href=\"https:\/\/yexintech.com\/ja\">Home<\/a> \/ <\/nav><\/div><\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div><div class=\"layout_badh\"><div class=\"shizhezhao\" style=\"opacity:0.56;background-color:#146ba2;\"><\/div><div class=\"PcOnly themepark-block_layout_ba lazyload swiper-lazy\" style=\"background-repeat:no-repeat;background-size:cover;background-attachment:fixed;\" data-background=\"http:\/\/henanyexin.com\/wp-content\/uploads\/2024\/12\/pro-1.jpg\"><\/div><div class=\"MovePnly themepark-block_layout_ba lazyload swiper-move-lazy\" style=\"background-repeat:no-repeat;background-size:cover;background-attachment:fixed;\" data-background=\"http:\/\/henanyexin.com\/wp-content\/uploads\/2024\/12\/pro-1.jpg\"><\/div><\/div><\/section>\n\n\n\n<section class=\"wp-block-themepark-block-themepark-area block_layout thempark-block undefined\" id=\"\" style=\"background-color:#ffffff;\" data-swiper-parallax=\"-700\"><div class=\"block_layout_in\" style=\"max-width:1200px;\">\n<div class=\"wp-block-column block_layout_in\">\n<h1 class=\"wp-block-heading has-text-align-center\"> CVD tube furnace<\/h1>\n\n\n\n<div class=\"wp-block-themepark-block-themepark-wright content-super-p\" style=\"font-size:16px;line-height:30px;padding:10px 0px;\">\n<div class=\"wp-block-column\">\n<p>High-temperature CVD tube furnace is a type of experimental or industrial equipment specifically designed for chemical vapor deposition (CVD) processes. It is widely used in high-tech fields such as new material synthesis, semiconductor manufacturing, nanomaterial preparation, carbon fiber processing, and phosphors. This equipment can perform thermal treatment and deposition reactions of materials under high temperature, vacuum, or controlled atmosphere conditions.<\/p>\n\n\n\n<figure class=\"wp-block-image size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"1300\" height=\"600\" src=\"https:\/\/yexintech.com\/wp-content\/uploads\/2025\/08\/cvd-furnace-001.jpg\" alt=\"CVD furnace\" class=\"wp-image-2235\" style=\"object-fit:cover;width:1300px;height:600px\" srcset=\"https:\/\/yexintech.com\/wp-content\/uploads\/2025\/08\/cvd-furnace-001.jpg 1300w, https:\/\/yexintech.com\/wp-content\/uploads\/2025\/08\/cvd-furnace-001-300x138.jpg 300w, https:\/\/yexintech.com\/wp-content\/uploads\/2025\/08\/cvd-furnace-001-1024x473.jpg 1024w, https:\/\/yexintech.com\/wp-content\/uploads\/2025\/08\/cvd-furnace-001-768x354.jpg 768w, https:\/\/yexintech.com\/wp-content\/uploads\/2025\/08\/cvd-furnace-001-18x8.jpg 18w\" sizes=\"auto, (max-width: 1300px) 100vw, 1300px\" \/><\/figure>\n\n\n\n<p>Core Structure and Components<br>Furnace: Typically features a double-layer stainless steel design with a built-in high-purity quartz or corundum tube (high-temperature resistance up to 1200-1600\u00b0C).<\/p>\n\n\n\n<p>Heating System: Resistive heating (such as silicon carbide rods or silicon molybdenum rods) or infrared heating, combined with a PID temperature control system for precise temperature control (\u00b11\u00b0C).<\/p>\n\n\n\n<p>Gas System: A multi-channel mass flow meter (MFC) controls the flow of reactant gases (such as CH\u2084, SiH\u2084, NH\u2083, etc.) and carrier gases (Ar\/N\u2082\/H\u2082), and is equipped with an exhaust gas treatment device.<\/p>\n\n\n\n<p>Vacuum System: Optional mechanical or molecular pumps are available to achieve a low vacuum environment (10\u207b\u00b3 to 10\u207b\u2076 Torr).<\/p>\n\n\n\n<p>Sample Holder: Quartz or graphite boat, supporting horizontal or vertical sample placement.<\/p>\n\n\n\n<p>Typical Applications: Thin film deposition: Growth of SiC, GaN, graphene, carbon nanotubes, etc.<\/p>\n\n\n\n<p>Doping Process: Phosphorus\/boron diffusion of semiconductor materials.<\/p>\n\n\n\n<p>Annealing: High-temperature crystallization of oxide thin films (such as ZnO and TiO\u2082).<\/p>\n\n\n\n<p>Powder Synthesis: Preparation of high-purity ceramic powders (such as Al\u2082O\u2083 and ZrO\u2082).<\/p>\n\n\n\n<p>Technical Advantages<br>Uniformity: Multi-temperature zone design ensures a temperature gradient within the furnace of \u2264\u00b15\u00b0C.<\/p>\n\n\n\n<p>Controllability: Programmable heating profiles (such as step heating and constant temperature hold).<\/p>\n\n\n\n<p>Safety: Overtemperature protection, gas leak alarm, and emergency cooling system.<\/p>\n\n\n\n<p>Key Selection Parameters<br>Temperature Range: Commonly 800-1600\u00b0C, with ultra-high-temperature models exceeding 1800\u00b0C.<\/p>\n\n\n\n<p>Tube Diameter: \u03a650-200mm, affecting sample capacity and gas flow rate.<\/p>\n\n\n\n<p>Compatible Atmospheres: Oxidizing (O\u2082), reducing (H\u2082), inert (Ar), or corrosive gases (special sealing design required).<\/p>\n\n\n\n<p>Automation: Optional PLC control, remote monitoring, and data logging capabilities are available.<\/p>\n\n\n\n<p>Operating Precautions<br>Pretreatment: A high-temperature oven is required for first use to remove impurities.<\/p>\n\n\n\n<p>Gas Sequence: First, evacuate with inert gas, then introduce the reaction gas.<\/p>\n\n\n\n<p>Maintenance: Clean the furnace tube regularly and inspect the seals for signs of wear.<\/p>\n\n\n\n<p>Common Problems and Solutions: Uneven film: Check the gas distributor for blockage and optimize the carrier gas flow rate.<\/p>\n\n\n\n<p>Temperature Fluctuation: Calibrate the thermocouple and check the heating element connections.<\/p>\n\n\n\n<p>Contamination: Avoid sample volatile deposits and use high-purity gases.<\/p>\n<\/div>\n<\/div>\n\n\n\n<h2 class=\"wp-block-heading has-text-align-left\"><\/h2>\n\n\n\n<h2 class=\"wp-block-heading has-text-align-left\">Cvd Tube Furnace<\/h2>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><td>Model<\/td><td>YX-1700C<\/td><\/tr><tr><td>Maximum temperature<\/td><td>1650\u2103<\/td><\/tr><tr><td>Continuous operating temperature<\/td><td>1550\u2103<\/td><\/tr><tr><td>Tube size<\/td><td>\u03a625\/50\/60\/80\/100*1000mm<\/td><\/tr><tr><td>Furnace chamber material<\/td><td>Ceramic fiber products<\/td><\/tr><tr><td>Recommended heating rate<\/td><td>Below 1400\u2103\u226410\u2103\/min, 1400\u2103 to 1600\u2103\u22645\u2103\/min<\/td><\/tr><tr><td>Temperature Control Method<\/td><td>Fuzzy PID control and auto-tuning; intelligent 30-segment programmable control; over-temperature and burnout alarm functions<\/td><\/tr><tr><td>Heating Zone Length<\/td><td>300mm<\/td><\/tr><tr><td>Constant Temperature Zone Length<\/td><td>150mm<\/td><\/tr><tr><td>Temperature Control Accuracy<\/td><td>\u00b11\u00b0C<\/td><\/tr><tr><td>Furnace Tube Dimensions<\/td><td>\u00d860\/80*1000mm (diameter optional)<\/td><\/tr><tr><td>Heating Element<\/td><td>Silicon molybdenum rod<\/td><\/tr><tr><td>Standard Accessories<\/td><td>1 high-purity corundum tube, 2 pairs of alumina tube plugs, 1 set of stainless steel flanges, 2 sets of fluororubber sealing rings, 1 pair of high-temperature gloves, 1 crucible hook, 1 small fuse<\/td><\/tr><tr><td>Sealing System<\/td><td>Both ends of the furnace tube are equipped with stainless steel sealing flanges (including precision needle valve, pointer type vacuum pressure gauge and hose type pagoda nozzle joint), and the port can be expanded according to actual use<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">Vacuum Tube Furnace Video<\/h2>\n\n\n\n<p><\/p>\n\n\n\n<div class=\"wp-block-themepark-block-themepark-iframe themepark-iframe\"><iframe src=\"https:\/\/www.youtube.com\/embed\/oVE9Sb0TBpg?si=07_HePL68xfWLuXm\" title=\"vacuum tube furnace\" scrolling=\"no\" frameborder=\"0\"><\/iframe><img decoding=\"async\" alt=\"vacuum tube furnace\" src=\"https:\/\/yexintech.com\/wp-content\/themes\/smartenterprise\/images\/iframe.jpg\"\/><\/div>\n<\/div>\n<\/div><div class=\"layout_badh\"><\/div><\/section>\n\n\n\n<p><\/p>\n\n\n\n<p><\/p>","protected":false},"excerpt":{"rendered":"","protected":false},"author":1,"featured_media":2232,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"themepark_post_bcolor":"#f0f4f9","themepark_post_width":"100%","themepark_post_img":"","themepark_post_img_po":"left","themepark_post_img_re":false,"themepark_post_img_cover":false,"themepark_post_img_fixed":false,"themepark_post_hide_title":true,"themepark_post_main_b":"","themepark_post_main_p":100,"themepark_paddingblock":true,"footnotes":""},"categories":[48],"tags":[81],"class_list":["post-1855","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-lab-furnace","tag-high-temperature-cvd-tube-furnace"],"metadata":{"_canshu":["a:4:{i:0;a:5:{s:5:\"title\";s:4:\"Size\";s:4:\"text\";s:9:\"customize\";s:2:\"f1\";s:0:\"\";s:2:\"f2\";s:0:\"\";s:2:\"f3\";s:0:\"\";}i:1;a:5:{s:5:\"title\";s:26:\"Classification temperature\";s:4:\"text\";s:14:\"\t1200-1900 \u00b0C\";s:2:\"f1\";s:0:\"\";s:2:\"f2\";s:0:\"\";s:2:\"f3\";s:0:\"\";}i:2;a:5:{s:5:\"title\";s:19:\"Working temperature\";s:4:\"text\";s:13:\"1000-1750 \u00b0C\";s:2:\"f1\";s:0:\"\";s:2:\"f2\";s:0:\"\";s:2:\"f3\";s:0:\"\";}i:3;a:5:{s:5:\"title\";s:5:\"Usage\";s:4:\"text\";s:53:\"High temperature fields that require product rigidity\";s:2:\"f1\";s:0:\"\";s:2:\"f2\";s:0:\"\";s:2:\"f3\";s:0:\"\";}}"],"themepark_post_width":["100%"],"themepark_post_img":[""],"themepark_post_img_re":[""],"themepark_post_img_cover":[""],"themepark_post_img_fixed":[""],"themepark_post_hide_title":["1"],"themepark_paddingblock":["1"],"catce":["sidebar-widgets4"],"views":["4659"],"themepark_post_bcolor":["#f0f4f9"],"themepark_seo_description":["CVD reactors capable of operating at atmospheric or low pressure, perfect for growing graphene, carbon nanotubes, and other advanced materials with exceptional uniformity."],"_wp_old_date":["2025-03-31","2025-08-08"],"themepark_seo_title":["CVD Reactor | Advanced Materials Synthesis & Semiconductor Processing"],"themepark_seo_keyword":["Tube Furnace for CVD \uff0c Industrial CVD Furnace\uff0c  Laboratory CVD Furnace"],"_wp_old_slug":["ceramic-fiberboard"],"_thumbnail_id":["2232"],"_dp_original":["1782"],"_edit_lock":["1761048293:1"],"_edit_last":["1"]},"medium_url":"https:\/\/yexintech.com\/wp-content\/uploads\/2025\/10\/cvd-furnace-2-300x300.webp","thumbnail_url":"https:\/\/yexintech.com\/wp-content\/uploads\/2025\/10\/cvd-furnace-2-150x150.webp","full_url":"https:\/\/yexintech.com\/wp-content\/uploads\/2025\/10\/cvd-furnace-2.webp","_links":{"self":[{"href":"https:\/\/yexintech.com\/ja\/wp-json\/wp\/v2\/posts\/1855","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/yexintech.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/yexintech.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/yexintech.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/yexintech.com\/ja\/wp-json\/wp\/v2\/comments?post=1855"}],"version-history":[{"count":7,"href":"https:\/\/yexintech.com\/ja\/wp-json\/wp\/v2\/posts\/1855\/revisions"}],"predecessor-version":[{"id":2238,"href":"https:\/\/yexintech.com\/ja\/wp-json\/wp\/v2\/posts\/1855\/revisions\/2238"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/yexintech.com\/ja\/wp-json\/wp\/v2\/media\/2232"}],"wp:attachment":[{"href":"https:\/\/yexintech.com\/ja\/wp-json\/wp\/v2\/media?parent=1855"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/yexintech.com\/ja\/wp-json\/wp\/v2\/categories?post=1855"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/yexintech.com\/ja\/wp-json\/wp\/v2\/tags?post=1855"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}